Micro-fluxgate sensor with closed core
نویسندگان
چکیده
Micro-fluxgate sensor with symmetrical core on both sides of the planar rectangular excitation and pick-up coils has substantially improved parameters compared to its single-core predecessor. Almost closed magnetic path for the excitation field allows much deeper saturation of the sensor core, which reduces the perming effect, hysteresis and noise. Perming of max. 5 μT for 6 mT field shock, 28 V/T sensitivity and 24 nT rms noise were achieved for 2 mm long sensor excited by 1 MHz, 180 mA rms sinewave current, without magnetic feedback.
منابع مشابه
Fabrication of MEMS-based Micro-fluxgate Sensor with Runway-shaped Co-based Amorphous Alloy Core
High-precision magnetic micro-sensor is an interdisciplinary subject of magnetic field measurement techniques and micro-electromechanical systems (MEMS) technology. A micro-fluxgate magnetic sensor based MEMS technology was designed and fabricated in this paper. This device is a micro-magnetic sensor with a symmetric construction, closed magnetic circuits and differential form. A 25μm thick Flu...
متن کاملFluxgate magnetic sensor and front-end circuitry in a micro-integrated system
A complete vector-2D micro-integrated sensors system for magnetic field measurement is proposed. The system consists of a micro-integrated Fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is the VITROVAC 6025X deposited over the micro-integrated coils with the RF magnetron sputtering process deposition.
متن کاملSymmetrical core improves micro-fluxgate sensors
Microfluxgate sensor with flat coil and double-sided symmetrical core has significantly improved parameters over the original asymmetric single-sided core design. The magnetic circuit of the new sensor is more closed and so the core is deeper saturated. The sensor hysteresis was decreased from 30 μT to 2.5 μT (for full range). Noise level was decreased from 242 nT to 27 nT rms (0.1 mHz to 10 Hz...
متن کاملRace-track fluxgate with adjustable feedthrough
Improved shape of the race-track fluxgate sensor is suggested, which allows precise symetrization of the sensor and thus lower level of the feedthrough signal. The sensor has high untuned sensitivity (16.7 V/T per 1 turn) and low crossfield response thanks to the high shape anisotropy. The closed core and low cross-section guarantee low power consumption, low noise and stable offset. The sensor...
متن کاملMicro-integrated Double Axis Planar Fluxgate
In this paper a double axis micro-integrated Fluxgate magnetic sensor is presented. The device was designed using a PCB dual axis sensor previously realized as a starting point. In the PCB version the experimental results exhibit excellent agreement with the simulations performed using a tool based on the finite element method. Using the same design approach a version of the double axis Fluxgat...
متن کامل